MEMS TECHNOLOGY
Auburn University
CourseELEC 5820
Introduction to Micro-Electro-Mechanical Systems (MEMS), the study of the materials and microfabrication processes used to fabricate MEMS devices, the principles of operation of MEMS devices, and an introduction to the different application areas of MEMS devices. 598 Samuel Ginn College of Engineering
- Credits
3 credits
- Course Code
ELEC 5820