Growth and Characterization of Thin Films II

University of Alabama at Birmingham

CoursePH 733

Basics of vacuum science. Methods of thin film deposition. Nucleation, evolution of microstructure and surface morphology of thin films. Simulation of growth processes. Thin film characterization techniques (SEM/SIM, TEM, SPM, XPS/AES, XRD, optical and mechanical measurements). Demonstrations on thin-film deposition and basic characterization of film microstructure and properties.

Credits: 3 credits
Course Code: PH 733