Fundamentals of Microelectronics Manufacturing

This course is an introduction to integrated circuit fabrication. Topics include crystal growth, wafer preparation, epitaxial growth, oxidation, diffusion, ion implantation, thin film deposition, lithography, etching, device and circuit formation, packaging, and testing. A significant part of the course is a project focusing on circuit design and simulation or on process design. Laboratory component involves the actual production and testing of a functional semiconductor device.